HRBS/channeling studies of ultra-thin ITO films on Si

10.1016/j.nimb.2007.11.022

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Bibliographic Details
Main Authors: Malar, P., Chan, T.K., Ho, C.S., Osipowicz, T.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96839
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Institution: National University of Singapore