HRBS/channeling studies of ultra-thin ITO films on Si

10.1016/j.nimb.2007.11.022

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Bibliographic Details
Main Authors:	Malar, P., Chan, T.K., Ho, C.S., Osipowicz, T.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	High-resolution RBS Interfacial strain Ion channeling
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96839
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96839
record_format	dspace
spelling	sg-nus-scholar.10635-968392023-10-26T20:44:09Z HRBS/channeling studies of ultra-thin ITO films on Si Malar, P. Chan, T.K. Ho, C.S. Osipowicz, T. PHYSICS High-resolution RBS Interfacial strain Ion channeling 10.1016/j.nimb.2007.11.022 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 266 8 1464-1467 NIMBE 2014-10-16T09:28:08Z 2014-10-16T09:28:08Z 2008-04 Article Malar, P., Chan, T.K., Ho, C.S., Osipowicz, T. (2008-04). HRBS/channeling studies of ultra-thin ITO films on Si. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 266 (8) : 1464-1467. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.11.022 0168583X http://scholarbank.nus.edu.sg/handle/10635/96839 000256677600067 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	High-resolution RBS Interfacial strain Ion channeling
spellingShingle	High-resolution RBS Interfacial strain Ion channeling Malar, P. Chan, T.K. Ho, C.S. Osipowicz, T. HRBS/channeling studies of ultra-thin ITO films on Si
description	10.1016/j.nimb.2007.11.022
author2	PHYSICS
author_facet	PHYSICS Malar, P. Chan, T.K. Ho, C.S. Osipowicz, T.
format	Article
author	Malar, P. Chan, T.K. Ho, C.S. Osipowicz, T.
author_sort	Malar, P.
title	HRBS/channeling studies of ultra-thin ITO films on Si
title_short	HRBS/channeling studies of ultra-thin ITO films on Si
title_full	HRBS/channeling studies of ultra-thin ITO films on Si
title_fullStr	HRBS/channeling studies of ultra-thin ITO films on Si
title_full_unstemmed	HRBS/channeling studies of ultra-thin ITO films on Si
title_sort	hrbs/channeling studies of ultra-thin ito films on si
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96839
_version_	1781786551427006464

HRBS/channeling studies of ultra-thin ITO films on Si

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