In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation

10.1002/sia.1903

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Main Authors:	Tan, S.K., Yeo, K.L., Wee, A.T.S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Ion beam oxidation Secondary ion mass spectrometry Surface transient X-ray photoelectron spectroscopy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96897
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96897
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spelling	sg-nus-scholar.10635-968972024-11-12T21:17:10Z In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation Tan, S.K. Yeo, K.L. Wee, A.T.S. PHYSICS Ion beam oxidation Secondary ion mass spectrometry Surface transient X-ray photoelectron spectroscopy 10.1002/sia.1903 Surface and Interface Analysis 36 7 640-644 SIAND 2014-10-16T09:28:50Z 2014-10-16T09:28:50Z 2004-07 Article Tan, S.K., Yeo, K.L., Wee, A.T.S. (2004-07). In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation. Surface and Interface Analysis 36 (7) : 640-644. ScholarBank@NUS Repository. https://doi.org/10.1002/sia.1903 01422421 http://scholarbank.nus.edu.sg/handle/10635/96897 000222866300006 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Ion beam oxidation Secondary ion mass spectrometry Surface transient X-ray photoelectron spectroscopy
spellingShingle	Ion beam oxidation Secondary ion mass spectrometry Surface transient X-ray photoelectron spectroscopy Tan, S.K. Yeo, K.L. Wee, A.T.S. In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation
description	10.1002/sia.1903
author2	PHYSICS
author_facet	PHYSICS Tan, S.K. Yeo, K.L. Wee, A.T.S.
format	Article
author	Tan, S.K. Yeo, K.L. Wee, A.T.S.
author_sort	Tan, S.K.
title	In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation
title_short	In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation
title_full	In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation
title_fullStr	In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation
title_full_unstemmed	In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation
title_sort	in situ xps and sims analysis of o 2 + beam-induced silicon oxidation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96897
_version_	1821220009454600192

In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation

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