In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation

10.1002/sia.1903

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Bibliographic Details
Main Authors: Tan, S.K., Yeo, K.L., Wee, A.T.S.
Other Authors: PHYSICS
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/96897
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Institution: National University of Singapore

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