In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation

In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation

10.1002/sia.1903

Saved in:
Bibliographic Details
Main Authors: Tan, S.K., Yeo, K.L., Wee, A.T.S.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Ion beam oxidation
Secondary ion mass spectrometry
Surface transient
X-ray photoelectron spectroscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96897
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/96897

Similar Items