In situ XPS and SIMS analysis of O 2 + beam-induced silicon oxidation

• Main Authors: Tan, S.K., Yeo, K.L., Wee, A.T.S.
• 其他作者: PHYSICS
• 格式: Article
• 出版: 2014
• 主題: Ion beam oxidation; Secondary ion mass spectrometry; Surface transient; X-ray photoelectron spectroscopy
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/96897
• 機構: National University of Singapore

10.1002/sia.1903