Multiphase structure of hydrogenated amorphous silicon carbide thin films

Multiphase structure of hydrogenated amorphous silicon carbide thin films

10.1016/S0921-5107(02)00204-0

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Main Authors: Wang, Y.H., Lin, J., Huan, C.H.A.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Hydrogenated amorphous silicon carbide
Microstructure
Multiphase
PE-CVD
Photoluminescence
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97278
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-972782023-10-29T23:13:29Z Multiphase structure of hydrogenated amorphous silicon carbide thin films Wang, Y.H. Lin, J. Huan, C.H.A. PHYSICS Hydrogenated amorphous silicon carbide Microstructure Multiphase PE-CVD Photoluminescence 10.1016/S0921-5107(02)00204-0 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 95 1 43-50 MSBTE 2014-10-16T09:33:24Z 2014-10-16T09:33:24Z 2002-07-01 Article Wang, Y.H., Lin, J., Huan, C.H.A. (2002-07-01). Multiphase structure of hydrogenated amorphous silicon carbide thin films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 95 (1) : 43-50. ScholarBank@NUS Repository. https://doi.org/10.1016/S0921-5107(02)00204-0 09215107 http://scholarbank.nus.edu.sg/handle/10635/97278 000177087100009 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Hydrogenated amorphous silicon carbide
Microstructure
Multiphase
PE-CVD
Photoluminescence
spellingShingle Hydrogenated amorphous silicon carbide
Microstructure
Multiphase
PE-CVD
Photoluminescence
Wang, Y.H.
Lin, J.
Huan, C.H.A.
Multiphase structure of hydrogenated amorphous silicon carbide thin films
description 10.1016/S0921-5107(02)00204-0
author2 PHYSICS
author_facet PHYSICS
Wang, Y.H.
Lin, J.
Huan, C.H.A.
format Article
author Wang, Y.H.
Lin, J.
Huan, C.H.A.
author_sort Wang, Y.H.
title Multiphase structure of hydrogenated amorphous silicon carbide thin films
title_short Multiphase structure of hydrogenated amorphous silicon carbide thin films
title_full Multiphase structure of hydrogenated amorphous silicon carbide thin films
title_fullStr Multiphase structure of hydrogenated amorphous silicon carbide thin films
title_full_unstemmed Multiphase structure of hydrogenated amorphous silicon carbide thin films
title_sort multiphase structure of hydrogenated amorphous silicon carbide thin films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/97278
_version_ 1781786638269022208

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