On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering

On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering

Chemical Physics Letters

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Main Authors: Xu, S., Li, H.-S., Li, Y.-A., Lee, S., Huan, C.H.A.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97428
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-974282015-02-26T23:22:37Z On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering Xu, S. Li, H.-S. Li, Y.-A. Lee, S. Huan, C.H.A. PHYSICS Chemical Physics Letters 287 5-6 731-736 CHPLB 2014-10-16T09:35:09Z 2014-10-16T09:35:09Z 1998-05-08 Article Xu, S.,Li, H.-S.,Li, Y.-A.,Lee, S.,Huan, C.H.A. (1998-05-08). On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering. Chemical Physics Letters 287 (5-6) : 731-736. ScholarBank@NUS Repository. 00092614 http://scholarbank.nus.edu.sg/handle/10635/97428 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Chemical Physics Letters
author2 PHYSICS
author_facet PHYSICS
Xu, S.
Li, H.-S.
Li, Y.-A.
Lee, S.
Huan, C.H.A.
format Article
author Xu, S.
Li, H.-S.
Li, Y.-A.
Lee, S.
Huan, C.H.A.
spellingShingle Xu, S.
Li, H.-S.
Li, Y.-A.
Lee, S.
Huan, C.H.A.
On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
author_sort Xu, S.
title On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
title_short On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
title_full On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
title_fullStr On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
title_full_unstemmed On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
title_sort on the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/97428
_version_ 1681091838887329792

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