On the structure and composition of polycrystalline carbon nitride films synthesized by reactive rf magnetron sputtering
Chemical Physics Letters
Saved in:
Main Authors: | Xu, S., Li, H.-S., Li, Y.-A., Lee, S., Huan, C.H.A. |
---|---|
Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97428 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films
by: Chen, G.L., et al.
Published: (2014) -
Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
by: Chen, G.L., et al.
Published: (2014) -
Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films
by: Chen, G.L., et al.
Published: (2014) -
Crystalline carbon-nitride films prepared by reactive radio frequency magnetron sputtering
by: Li, Han Shi.
Published: (2010) -
Ordered boron nitride thin film growth with reactive magnetron sputtering
by: Loh, Li Quan
Published: (2017)