Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film

Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film

10.1016/S0925-9635(00)00450-7

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Main Authors: Wang, Y.H., Lin, J., Huan, C.H.A., Feng, Z.C., Chua, S.J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
3C-SiC
Hydrogenated amorphous silicon carbide
Rapid thermal annealing
Statistically oriented
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97576
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-975762024-11-13T13:30:22Z Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film Wang, Y.H. Lin, J. Huan, C.H.A. Feng, Z.C. Chua, S.J. PHYSICS 3C-SiC Hydrogenated amorphous silicon carbide Rapid thermal annealing Statistically oriented 10.1016/S0925-9635(00)00450-7 Diamond and Related Materials 10 3-7 1268-1272 DRMTE 2014-10-16T09:36:52Z 2014-10-16T09:36:52Z 2001-03 Article Wang, Y.H., Lin, J., Huan, C.H.A., Feng, Z.C., Chua, S.J. (2001-03). Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film. Diamond and Related Materials 10 (3-7) : 1268-1272. ScholarBank@NUS Repository. https://doi.org/10.1016/S0925-9635(00)00450-7 09259635 http://scholarbank.nus.edu.sg/handle/10635/97576 000168730600187 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic 3C-SiC
Hydrogenated amorphous silicon carbide
Rapid thermal annealing
Statistically oriented
spellingShingle 3C-SiC
Hydrogenated amorphous silicon carbide
Rapid thermal annealing
Statistically oriented
Wang, Y.H.
Lin, J.
Huan, C.H.A.
Feng, Z.C.
Chua, S.J.
Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
description 10.1016/S0925-9635(00)00450-7
author2 PHYSICS
author_facet PHYSICS
Wang, Y.H.
Lin, J.
Huan, C.H.A.
Feng, Z.C.
Chua, S.J.
format Article
author Wang, Y.H.
Lin, J.
Huan, C.H.A.
Feng, Z.C.
Chua, S.J.
author_sort Wang, Y.H.
title Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
title_short Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
title_full Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
title_fullStr Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
title_full_unstemmed Post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
title_sort post-growth rapid thermal annealing effect on hydrogenated amorphous silicon carbide thin film
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/97576
_version_ 1821195528688369664

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