Proton micromachining: A new technique for the production of three-dimensional microstructures
Microsystem Technologies
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sg-nus-scholar.10635-976432015-01-12T09:01:05Z Proton micromachining: A new technique for the production of three-dimensional microstructures Van Kan, J.A. Sanchez, J.L. Osipowicz, T. Watt, F. PHYSICS Microsystem Technologies 6 3 82-85 2014-10-16T09:37:39Z 2014-10-16T09:37:39Z 2000-02 Article Van Kan, J.A.,Sanchez, J.L.,Osipowicz, T.,Watt, F. (2000-02). Proton micromachining: A new technique for the production of three-dimensional microstructures. Microsystem Technologies 6 (3) : 82-85. ScholarBank@NUS Repository. 09467076 http://scholarbank.nus.edu.sg/handle/10635/97643 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Microsystem Technologies |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Van Kan, J.A. Sanchez, J.L. Osipowicz, T. Watt, F. |
| format |
Article |
| author |
Van Kan, J.A. Sanchez, J.L. Osipowicz, T. Watt, F. |
| spellingShingle |
Van Kan, J.A. Sanchez, J.L. Osipowicz, T. Watt, F. Proton micromachining: A new technique for the production of three-dimensional microstructures |
| author_sort |
Van Kan, J.A. |
| title |
Proton micromachining: A new technique for the production of three-dimensional microstructures |
| title_short |
Proton micromachining: A new technique for the production of three-dimensional microstructures |
| title_full |
Proton micromachining: A new technique for the production of three-dimensional microstructures |
| title_fullStr |
Proton micromachining: A new technique for the production of three-dimensional microstructures |
| title_full_unstemmed |
Proton micromachining: A new technique for the production of three-dimensional microstructures |
| title_sort |
proton micromachining: a new technique for the production of three-dimensional microstructures |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97643 |
| _version_ |
1681091878238289920 |