Proton micromachining: A new technique for the production of three-dimensional microstructures
Microsystem Technologies
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Main Authors: | Van Kan, J.A., Sanchez, J.L., Osipowicz, T., Watt, F. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97643 |
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Institution: | National University of Singapore |
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