Reaction of SiO2 with hafnium oxide in low oxygen pressure

• Main Authors: Wang, S.J., Lim, P.C., Huan, A.C.H., Lu, C.L., Chai, J.W., Chow, S.Y., Pan, J.S., Li, Q., Ong, C.K.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/97761
• Institution: National University of Singapore

10.1063/1.1565182