Reaction of SiO2 with hafnium oxide in low oxygen pressure
10.1063/1.1565182
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Main Authors: | Wang, S.J., Lim, P.C., Huan, A.C.H., Lu, C.L., Chai, J.W., Chow, S.Y., Pan, J.S., Li, Q., Ong, C.K. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97761 |
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Institution: | National University of Singapore |
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