Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment

• Main Authors: Huan, C.H.A., Wee, A.T.S., Low, H.S.M., Tan, K.L.
• 其他作者: PHYSICS
• 格式: Article
• 出版: 2014
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/97872

10.1016/0042-207X(95)00207-3