Silicon nanostructures fabricated by Au and SiH4 co-deposition technique using hot-wire chemical vapor deposition

• Main Authors: Chong, S.K., Goh, B.T., Aspanut, Z., Muhamad, M.R., Varghese, B., Sow, C.H., Dee, C.F., Rahman, S.A.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: High-resolution transmission electron microscopy; Hot-wire chemical vapor deposition; Nanostructures; Optical reflectance; Raman spectroscopy; Silicon; X-ray diffraction
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/97920
• Institution: National University of Singapore

10.1016/j.tsf.2011.06.042