Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry

10.1063/1.4747487

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Main Authors:	Chan, T.K., Fang, F., Markwitz, A., Osipowicz, T.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97961
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97961
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spelling	sg-nus-scholar.10635-979612023-10-30T08:06:20Z Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry Chan, T.K. Fang, F. Markwitz, A. Osipowicz, T. PHYSICS 10.1063/1.4747487 Applied Physics Letters 101 8 - APPLA 2014-10-16T09:41:23Z 2014-10-16T09:41:23Z 2012-08-20 Article Chan, T.K., Fang, F., Markwitz, A., Osipowicz, T. (2012-08-20). Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry. Applied Physics Letters 101 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4747487 00036951 http://scholarbank.nus.edu.sg/handle/10635/97961 000308420800023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.4747487
author2	PHYSICS
author_facet	PHYSICS Chan, T.K. Fang, F. Markwitz, A. Osipowicz, T.
format	Article
author	Chan, T.K. Fang, F. Markwitz, A. Osipowicz, T.
spellingShingle	Chan, T.K. Fang, F. Markwitz, A. Osipowicz, T. Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry
author_sort	Chan, T.K.
title	Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry
title_short	Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry
title_full	Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry
title_fullStr	Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry
title_full_unstemmed	Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry
title_sort	solid phase epitaxy of ultra-shallow sn implanted si observed using high-resolution rutherford backscattering spectrometry
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97961
_version_	1781786777250430976

Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry

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