Spatial characterization of doped SiC wafers by Raman spectroscopy
Journal of Applied Physics
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sg-nus-scholar.10635-979732015-02-03T13:58:44Z Spatial characterization of doped SiC wafers by Raman spectroscopy Burton, J.C. Sun, L. Pophristic, M. Lukacs, S.J. Long, F.H. Feng, Z.C. Ferguson, I.T. PHYSICS Journal of Applied Physics 84 11 6268-6273 JAPIA 2014-10-16T09:41:31Z 2014-10-16T09:41:31Z 1998-12-01 Article Burton, J.C.,Sun, L.,Pophristic, M.,Lukacs, S.J.,Long, F.H.,Feng, Z.C.,Ferguson, I.T. (1998-12-01). Spatial characterization of doped SiC wafers by Raman spectroscopy. Journal of Applied Physics 84 (11) : 6268-6273. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/97973 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Journal of Applied Physics |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Burton, J.C. Sun, L. Pophristic, M. Lukacs, S.J. Long, F.H. Feng, Z.C. Ferguson, I.T. |
| format |
Article |
| author |
Burton, J.C. Sun, L. Pophristic, M. Lukacs, S.J. Long, F.H. Feng, Z.C. Ferguson, I.T. |
| spellingShingle |
Burton, J.C. Sun, L. Pophristic, M. Lukacs, S.J. Long, F.H. Feng, Z.C. Ferguson, I.T. Spatial characterization of doped SiC wafers by Raman spectroscopy |
| author_sort |
Burton, J.C. |
| title |
Spatial characterization of doped SiC wafers by Raman spectroscopy |
| title_short |
Spatial characterization of doped SiC wafers by Raman spectroscopy |
| title_full |
Spatial characterization of doped SiC wafers by Raman spectroscopy |
| title_fullStr |
Spatial characterization of doped SiC wafers by Raman spectroscopy |
| title_full_unstemmed |
Spatial characterization of doped SiC wafers by Raman spectroscopy |
| title_sort |
spatial characterization of doped sic wafers by raman spectroscopy |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97973 |
| _version_ |
1681091939117563904 |