Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating

Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating

10.1088/0960-1317/16/10/008

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Bibliographic Details
Main Authors: Ansari, K., Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98014
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Institution: National University of Singapore
Description
Summary:10.1088/0960-1317/16/10/008

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