Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating
10.1088/0960-1317/16/10/008
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2014
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sg-nus-scholar.10635-980142023-10-26T09:46:35Z Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F. PHYSICS 10.1088/0960-1317/16/10/008 Journal of Micromechanics and Microengineering 16 10 1967-1974 JMMIE 2014-10-16T09:41:59Z 2014-10-16T09:41:59Z 2006-10-01 Article Ansari, K., Van Kan, J.A., Bettiol, A.A., Watt, F. (2006-10-01). Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating. Journal of Micromechanics and Microengineering 16 (10) : 1967-1974. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/16/10/008 09601317 http://scholarbank.nus.edu.sg/handle/10635/98014 000242169400009 Scopus |
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10.1088/0960-1317/16/10/008 |
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PHYSICS |
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PHYSICS Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F. |
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Article |
| author |
Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F. |
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Ansari, K. Van Kan, J.A. Bettiol, A.A. Watt, F. Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating |
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Ansari, K. |
| title |
Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating |
| title_short |
Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating |
| title_full |
Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating |
| title_fullStr |
Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating |
| title_full_unstemmed |
Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating |
| title_sort |
stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98014 |
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1781786789031182336 |