Structural, optical, and surface science studies of 4H-SiC epilayers grown by low pressure chemical vapor deposition

Structural, optical, and surface science studies of 4H-SiC epilayers grown by low pressure chemical vapor deposition

Journal of Electronic Materials

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Bibliographic Details
Main Authors: Feng, Z.C., Rohatgi, A., Tin, C.C., Hu, R., Wee, A.T.S., Se, K.P.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
4H-SiC
Fourier infrared reflectance
Low pressure chemical vapor deposition
Raman scattering
X-ray diffraction
X-ray photoelectron spectroscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98066
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/98066

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