Structural, optical, and surface science studies of 4H-SiC epilayers grown by low pressure chemical vapor deposition

• Main Authors: Feng, Z.C., Rohatgi, A., Tin, C.C., Hu, R., Wee, A.T.S., Se, K.P.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: 4H-SiC; Fourier infrared reflectance; Low pressure chemical vapor deposition; Raman scattering; X-ray diffraction; X-ray photoelectron spectroscopy
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98066
• Institution: National University of Singapore

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