Surface and interface studies of titanium silicide formation

Thin Solid Films

Saved in:
Bibliographic Details
Main Authors: Wee, A.T.S., Huan, A.C.H., Osipowicz, T., Lee, K.K., Thian, W.H., Tan, K.L., Hogan, R.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98123
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:Thin Solid Films