Surface and interface studies of titanium silicide formation

Surface and interface studies of titanium silicide formation

Thin Solid Films

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Bibliographic Details
Main Authors:	Wee, A.T.S., Huan, A.C.H., Osipowicz, T., Lee, K.K., Thian, W.H., Tan, K.L., Hogan, R.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Rutherford backscattering spectroscopy; secondary ion mass spectrometry (SIMS) Silicides Titanium
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98123
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Institution:	National University of Singapore

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