Surface and interface studies of titanium silicide formation

Thin Solid Films

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Bibliographic Details
Main Authors:	Wee, A.T.S., Huan, A.C.H., Osipowicz, T., Lee, K.K., Thian, W.H., Tan, K.L., Hogan, R.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Rutherford backscattering spectroscopy; secondary ion mass spectrometry (SIMS) Silicides Titanium
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98123
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98123
record_format	dspace
spelling	sg-nus-scholar.10635-981232015-01-28T12:05:09Z Surface and interface studies of titanium silicide formation Wee, A.T.S. Huan, A.C.H. Osipowicz, T. Lee, K.K. Thian, W.H. Tan, K.L. Hogan, R. PHYSICS Rutherford backscattering spectroscopy; secondary ion mass spectrometry (SIMS) Silicides Titanium Thin Solid Films 283 1-2 130-134 THSFA 2014-10-16T09:43:18Z 2014-10-16T09:43:18Z 1996-09-01 Article Wee, A.T.S.,Huan, A.C.H.,Osipowicz, T.,Lee, K.K.,Thian, W.H.,Tan, K.L.,Hogan, R. (1996-09-01). Surface and interface studies of titanium silicide formation. Thin Solid Films 283 (1-2) : 130-134. ScholarBank@NUS Repository. 00406090 http://scholarbank.nus.edu.sg/handle/10635/98123 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Rutherford backscattering spectroscopy; secondary ion mass spectrometry (SIMS) Silicides Titanium
spellingShingle	Rutherford backscattering spectroscopy; secondary ion mass spectrometry (SIMS) Silicides Titanium Wee, A.T.S. Huan, A.C.H. Osipowicz, T. Lee, K.K. Thian, W.H. Tan, K.L. Hogan, R. Surface and interface studies of titanium silicide formation
description	Thin Solid Films
author2	PHYSICS
author_facet	PHYSICS Wee, A.T.S. Huan, A.C.H. Osipowicz, T. Lee, K.K. Thian, W.H. Tan, K.L. Hogan, R.
format	Article
author	Wee, A.T.S. Huan, A.C.H. Osipowicz, T. Lee, K.K. Thian, W.H. Tan, K.L. Hogan, R.
author_sort	Wee, A.T.S.
title	Surface and interface studies of titanium silicide formation
title_short	Surface and interface studies of titanium silicide formation
title_full	Surface and interface studies of titanium silicide formation
title_fullStr	Surface and interface studies of titanium silicide formation
title_full_unstemmed	Surface and interface studies of titanium silicide formation
title_sort	surface and interface studies of titanium silicide formation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98123
_version_	1681091966343839744

Surface and interface studies of titanium silicide formation

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