Surface and interface studies of titanium silicide formation

• Main Authors: Wee, A.T.S., Huan, A.C.H., Osipowicz, T., Lee, K.K., Thian, W.H., Tan, K.L., Hogan, R.
• 其他作者: PHYSICS
• 格式: Article
• 出版: 2014
• 主題: Rutherford backscattering spectroscopy; secondary ion mass spectrometry (SIMS); Silicides; Titanium
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/98123

Thin Solid Films