The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films
10.1016/j.tsf.2004.05.009
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2014
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sg-nus-scholar.10635-982512023-10-29T22:30:33Z The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films Li, Q. Wang, S.J. Lim, P.C. Chai, J.W. Huan, A.C.H. Ong, C.K. PHYSICS Deposition SiO2 XPS 10.1016/j.tsf.2004.05.009 Thin Solid Films 462-463 SPEC. ISS. 106-109 THSFA 2014-10-16T09:44:47Z 2014-10-16T09:44:47Z 2004-09 Article Li, Q., Wang, S.J., Lim, P.C., Chai, J.W., Huan, A.C.H., Ong, C.K. (2004-09). The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films. Thin Solid Films 462-463 (SPEC. ISS.) : 106-109. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.009 00406090 http://scholarbank.nus.edu.sg/handle/10635/98251 000223812800023 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Deposition SiO2 XPS |
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Deposition SiO2 XPS Li, Q. Wang, S.J. Lim, P.C. Chai, J.W. Huan, A.C.H. Ong, C.K. The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films |
| description |
10.1016/j.tsf.2004.05.009 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Li, Q. Wang, S.J. Lim, P.C. Chai, J.W. Huan, A.C.H. Ong, C.K. |
| format |
Article |
| author |
Li, Q. Wang, S.J. Lim, P.C. Chai, J.W. Huan, A.C.H. Ong, C.K. |
| author_sort |
Li, Q. |
| title |
The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films |
| title_short |
The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films |
| title_full |
The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films |
| title_fullStr |
The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films |
| title_full_unstemmed |
The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films |
| title_sort |
decomposition mechanism of sio2 with the deposition of oxygen-deficient m(hf or zr)ox films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98251 |
| _version_ |
1781786835484147712 |