Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices

10.1016/j.tsf.2004.05.050

Saved in:

Bibliographic Details
Main Authors:	Wong, L.H., Wong, C.C., Ong, K.K., Liu, J.P., Chan, L., Rao, R., Pey, K.L., Liu, L., Shen, Z.X.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Raman Silicon germanium Strained silicon Thermal stability
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98370
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-98370
record_format	dspace
spelling	sg-nus-scholar.10635-983702024-11-08T21:04:27Z Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices Wong, L.H. Wong, C.C. Ong, K.K. Liu, J.P. Chan, L. Rao, R. Pey, K.L. Liu, L. Shen, Z.X. PHYSICS Raman Silicon germanium Strained silicon Thermal stability 10.1016/j.tsf.2004.05.050 Thin Solid Films 462-463 SPEC. ISS. 76-79 THSFA 2014-10-16T09:46:16Z 2014-10-16T09:46:16Z 2004-09 Article Wong, L.H., Wong, C.C., Ong, K.K., Liu, J.P., Chan, L., Rao, R., Pey, K.L., Liu, L., Shen, Z.X. (2004-09). Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices. Thin Solid Films 462-463 (SPEC. ISS.) : 76-79. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.050 00406090 http://scholarbank.nus.edu.sg/handle/10635/98370 000223812800017 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Raman Silicon germanium Strained silicon Thermal stability
spellingShingle	Raman Silicon germanium Strained silicon Thermal stability Wong, L.H. Wong, C.C. Ong, K.K. Liu, J.P. Chan, L. Rao, R. Pey, K.L. Liu, L. Shen, Z.X. Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices
description	10.1016/j.tsf.2004.05.050
author2	PHYSICS
author_facet	PHYSICS Wong, L.H. Wong, C.C. Ong, K.K. Liu, J.P. Chan, L. Rao, R. Pey, K.L. Liu, L. Shen, Z.X.
format	Article
author	Wong, L.H. Wong, C.C. Ong, K.K. Liu, J.P. Chan, L. Rao, R. Pey, K.L. Liu, L. Shen, Z.X.
author_sort	Wong, L.H.
title	Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices
title_short	Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices
title_full	Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices
title_fullStr	Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices
title_full_unstemmed	Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices
title_sort	thermal stability of strained si/si1-xgex heterostructures for advanced microelectronics devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98370
_version_	1821207393745240064

Thermal stability of strained Si/Si1-xGex heterostructures for advanced microelectronics devices

Similar Items