TOF study of pulsed-laser ablation of aluminum nitride for thin film growth

Applied Surface Science

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Bibliographic Details
Main Authors: Chu, C., Ong, P.P., Chen, H.F., Teo, H.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98415
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Institution: National University of Singapore
Description
Summary:Applied Surface Science