TOF study of pulsed-laser ablation of aluminum nitride for thin film growth
Applied Surface Science
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sg-nus-scholar.10635-984152015-01-09T00:05:11Z TOF study of pulsed-laser ablation of aluminum nitride for thin film growth Chu, C. Ong, P.P. Chen, H.F. Teo, H.H. PHYSICS Laser ablation Laser ionization time-of-flight mass spectrometry (TOF-MS) Pulsed-laser deposition (PLD) Applied Surface Science 137 1-3 91-97 ASUSE 2014-10-16T09:46:49Z 2014-10-16T09:46:49Z 1999-01-01 Article Chu, C.,Ong, P.P.,Chen, H.F.,Teo, H.H. (1999-01-01). TOF study of pulsed-laser ablation of aluminum nitride for thin film growth. Applied Surface Science 137 (1-3) : 91-97. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/98415 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| topic |
Laser ablation Laser ionization time-of-flight mass spectrometry (TOF-MS) Pulsed-laser deposition (PLD) |
| spellingShingle |
Laser ablation Laser ionization time-of-flight mass spectrometry (TOF-MS) Pulsed-laser deposition (PLD) Chu, C. Ong, P.P. Chen, H.F. Teo, H.H. TOF study of pulsed-laser ablation of aluminum nitride for thin film growth |
| description |
Applied Surface Science |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Chu, C. Ong, P.P. Chen, H.F. Teo, H.H. |
| format |
Article |
| author |
Chu, C. Ong, P.P. Chen, H.F. Teo, H.H. |
| author_sort |
Chu, C. |
| title |
TOF study of pulsed-laser ablation of aluminum nitride for thin film growth |
| title_short |
TOF study of pulsed-laser ablation of aluminum nitride for thin film growth |
| title_full |
TOF study of pulsed-laser ablation of aluminum nitride for thin film growth |
| title_fullStr |
TOF study of pulsed-laser ablation of aluminum nitride for thin film growth |
| title_full_unstemmed |
TOF study of pulsed-laser ablation of aluminum nitride for thin film growth |
| title_sort |
tof study of pulsed-laser ablation of aluminum nitride for thin film growth |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98415 |
| _version_ |
1681092019798147072 |