TOF study of pulsed-laser ablation of aluminum nitride for thin film growth
Applied Surface Science
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Main Authors: | Chu, C., Ong, P.P., Chen, H.F., Teo, H.H. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98415 |
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Institution: | National University of Singapore |
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