TOF study of pulsed-laser ablation of aluminum nitride for thin film growth

Applied Surface Science

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Bibliographic Details
Main Authors:	Chu, C., Ong, P.P., Chen, H.F., Teo, H.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Laser ablation Laser ionization time-of-flight mass spectrometry (TOF-MS) Pulsed-laser deposition (PLD)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98415
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Institution:	National University of Singapore

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