Ultralow-energy SIMS for shallow semiconductor depth profiling

10.1016/j.apsusc.2008.05.030

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Bibliographic Details
Main Authors:	Chanbasha, A.R., Wee, A.T.S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Cesium Depth profiling Oxygen Silicon SIMS Ultralow-energy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98505
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98505
record_format	dspace
spelling	sg-nus-scholar.10635-985052023-10-30T07:16:22Z Ultralow-energy SIMS for shallow semiconductor depth profiling Chanbasha, A.R. Wee, A.T.S. PHYSICS Cesium Depth profiling Oxygen Silicon SIMS Ultralow-energy 10.1016/j.apsusc.2008.05.030 Applied Surface Science 255 4 1307-1310 ASUSE 2014-10-16T09:47:52Z 2014-10-16T09:47:52Z 2008-12-15 Article Chanbasha, A.R., Wee, A.T.S. (2008-12-15). Ultralow-energy SIMS for shallow semiconductor depth profiling. Applied Surface Science 255 (4) : 1307-1310. ScholarBank@NUS Repository. https://doi.org/10.1016/j.apsusc.2008.05.030 01694332 http://scholarbank.nus.edu.sg/handle/10635/98505 000267217500024 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Cesium Depth profiling Oxygen Silicon SIMS Ultralow-energy
spellingShingle	Cesium Depth profiling Oxygen Silicon SIMS Ultralow-energy Chanbasha, A.R. Wee, A.T.S. Ultralow-energy SIMS for shallow semiconductor depth profiling
description	10.1016/j.apsusc.2008.05.030
author2	PHYSICS
author_facet	PHYSICS Chanbasha, A.R. Wee, A.T.S.
format	Article
author	Chanbasha, A.R. Wee, A.T.S.
author_sort	Chanbasha, A.R.
title	Ultralow-energy SIMS for shallow semiconductor depth profiling
title_short	Ultralow-energy SIMS for shallow semiconductor depth profiling
title_full	Ultralow-energy SIMS for shallow semiconductor depth profiling
title_fullStr	Ultralow-energy SIMS for shallow semiconductor depth profiling
title_full_unstemmed	Ultralow-energy SIMS for shallow semiconductor depth profiling
title_sort	ultralow-energy sims for shallow semiconductor depth profiling
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98505
_version_	1781786890930749440

Ultralow-energy SIMS for shallow semiconductor depth profiling

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