Ultralow-energy SIMS for shallow semiconductor depth profiling
10.1016/j.apsusc.2008.05.030
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Main Authors: | Chanbasha, A.R., Wee, A.T.S. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98505 |
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Institution: | National University of Singapore |
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