Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling
10.1116/1.1368680
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2014
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sg-nus-scholar.10635-986872024-11-12T21:16:44Z Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. PHYSICS 10.1116/1.1368680 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 3 829-835 JVTBD 2014-10-16T09:50:12Z 2014-10-16T09:50:12Z 2001-05 Conference Paper Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A. (2001-05). Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 (3) : 829-835. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1368680 10711023 http://scholarbank.nus.edu.sg/handle/10635/98687 000169366600038 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1116/1.1368680 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. |
| format |
Conference or Workshop Item |
| author |
Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. |
| spellingShingle |
Ng, C.M. Wee, A.T.S. Huan, C.H.A. See, A. Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling |
| author_sort |
Ng, C.M. |
| title |
Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling |
| title_short |
Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling |
| title_full |
Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling |
| title_fullStr |
Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling |
| title_full_unstemmed |
Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling |
| title_sort |
effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98687 |
| _version_ |
1821225059490988032 |