Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing

10.1149/1.2209374

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Bibliographic Details
Main Authors:	Ong, K.K., Pey, K.L., Lee, P.S., Wee, A.T.S., Wang, X.C., Wong, L.H.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98698
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98698
record_format	dspace
spelling	sg-nus-scholar.10635-986982015-02-22T20:22:19Z Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Wong, L.H. PHYSICS 10.1149/1.2209374 ECS Transactions 1 30 1-6 2014-10-16T09:50:20Z 2014-10-16T09:50:20Z 2006 Conference Paper Ong, K.K.,Pey, K.L.,Lee, P.S.,Wee, A.T.S.,Wang, X.C.,Wong, L.H. (2006). Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing. ECS Transactions 1 (30) : 1-6. ScholarBank@NUS Repository. <a href="https://doi.org/10.1149/1.2209374" target="_blank">https://doi.org/10.1149/1.2209374</a> 19385862 http://scholarbank.nus.edu.sg/handle/10635/98698 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1149/1.2209374
author2	PHYSICS
author_facet	PHYSICS Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Wong, L.H.
format	Conference or Workshop Item
author	Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Wong, L.H.
spellingShingle	Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Wong, L.H. Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing
author_sort	Ong, K.K.
title	Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing
title_short	Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing
title_full	Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing
title_fullStr	Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing
title_full_unstemmed	Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing
title_sort	enhanced boron activation in strained-si/si1-xgex substrate using laser annealing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98698
_version_	1681092071300005888

Enhanced boron activation in strained-Si/Si1-xGex substrate using laser annealing

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