High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers

10.1016/S0168-583X(03)01090-5

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Main Authors: Seng, H.L., Osipowicz, T., Sum, T.C., Breese, M.B.H., Watt, F., Tok, E.S., Zhang, J.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98741
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-987412023-10-25T23:05:03Z High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers Seng, H.L. Osipowicz, T. Sum, T.C. Breese, M.B.H. Watt, F. Tok, E.S. Zhang, J. PHYSICS MATERIALS SCIENCE Channeling contrast microscopy SiGe Virtual substrate 10.1016/S0168-583X(03)01090-5 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 483-488 NIMBE 2014-10-16T09:50:53Z 2014-10-16T09:50:53Z 2003-09 Conference Paper Seng, H.L., Osipowicz, T., Sum, T.C., Breese, M.B.H., Watt, F., Tok, E.S., Zhang, J. (2003-09). High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 : 483-488. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01090-5 0168583X http://scholarbank.nus.edu.sg/handle/10635/98741 000185352300090 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Channeling contrast microscopy
SiGe
Virtual substrate
spellingShingle Channeling contrast microscopy
SiGe
Virtual substrate
Seng, H.L.
Osipowicz, T.
Sum, T.C.
Breese, M.B.H.
Watt, F.
Tok, E.S.
Zhang, J.
High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers
description 10.1016/S0168-583X(03)01090-5
author2 PHYSICS
author_facet PHYSICS
Seng, H.L.
Osipowicz, T.
Sum, T.C.
Breese, M.B.H.
Watt, F.
Tok, E.S.
Zhang, J.
format Conference or Workshop Item
author Seng, H.L.
Osipowicz, T.
Sum, T.C.
Breese, M.B.H.
Watt, F.
Tok, E.S.
Zhang, J.
author_sort Seng, H.L.
title High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers
title_short High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers
title_full High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers
title_fullStr High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers
title_full_unstemmed High-resolution channeling contrast microscopy of compositionally graded Si1-XGeX layers
title_sort high-resolution channeling contrast microscopy of compositionally graded si1-xgex layers
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98741
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