Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality

Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality

10.1117/12.436674

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Bibliographic Details
Main Authors: Van Kan, J.A., Bettiol, A.A., Ansari, K., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
3D microstructures
Electroplating
High aspect ratio
Micromachining
Nuclear microscope
Proton beam
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98796
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Institution: National University of Singapore
Description
Summary:10.1117/12.436674

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