Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality

10.1117/12.436674

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Bibliographic Details
Main Authors: Van Kan, J.A., Bettiol, A.A., Ansari, K., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98796
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-987962023-10-25T22:28:09Z Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality Van Kan, J.A. Bettiol, A.A. Ansari, K. Watt, F. PHYSICS 3D microstructures Electroplating High aspect ratio Micromachining Nuclear microscope Proton beam 10.1117/12.436674 Proceedings of SPIE - The International Society for Optical Engineering 4343 466-472 PSISD 2014-10-16T09:51:33Z 2014-10-16T09:51:33Z 2001 Conference Paper Van Kan, J.A., Bettiol, A.A., Ansari, K., Watt, F. (2001). Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality. Proceedings of SPIE - The International Society for Optical Engineering 4343 : 466-472. ScholarBank@NUS Repository. https://doi.org/10.1117/12.436674 0277786X http://scholarbank.nus.edu.sg/handle/10635/98796 000172675100049 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic 3D microstructures
Electroplating
High aspect ratio
Micromachining
Nuclear microscope
Proton beam
spellingShingle 3D microstructures
Electroplating
High aspect ratio
Micromachining
Nuclear microscope
Proton beam
Van Kan, J.A.
Bettiol, A.A.
Ansari, K.
Watt, F.
Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
description 10.1117/12.436674
author2 PHYSICS
author_facet PHYSICS
Van Kan, J.A.
Bettiol, A.A.
Ansari, K.
Watt, F.
format Conference or Workshop Item
author Van Kan, J.A.
Bettiol, A.A.
Ansari, K.
Watt, F.
author_sort Van Kan, J.A.
title Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
title_short Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
title_full Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
title_fullStr Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
title_full_unstemmed Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
title_sort micromachining using a focused mev proton beam for the production of high precision 3d microstructures with vertical sidewalls of high orthogonality
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98796
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