Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
10.1117/12.436674
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sg-nus-scholar.10635-987962023-10-25T22:28:09Z Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality Van Kan, J.A. Bettiol, A.A. Ansari, K. Watt, F. PHYSICS 3D microstructures Electroplating High aspect ratio Micromachining Nuclear microscope Proton beam 10.1117/12.436674 Proceedings of SPIE - The International Society for Optical Engineering 4343 466-472 PSISD 2014-10-16T09:51:33Z 2014-10-16T09:51:33Z 2001 Conference Paper Van Kan, J.A., Bettiol, A.A., Ansari, K., Watt, F. (2001). Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality. Proceedings of SPIE - The International Society for Optical Engineering 4343 : 466-472. ScholarBank@NUS Repository. https://doi.org/10.1117/12.436674 0277786X http://scholarbank.nus.edu.sg/handle/10635/98796 000172675100049 Scopus |
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3D microstructures Electroplating High aspect ratio Micromachining Nuclear microscope Proton beam |
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3D microstructures Electroplating High aspect ratio Micromachining Nuclear microscope Proton beam Van Kan, J.A. Bettiol, A.A. Ansari, K. Watt, F. Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality |
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10.1117/12.436674 |
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PHYSICS |
author_facet |
PHYSICS Van Kan, J.A. Bettiol, A.A. Ansari, K. Watt, F. |
format |
Conference or Workshop Item |
author |
Van Kan, J.A. Bettiol, A.A. Ansari, K. Watt, F. |
author_sort |
Van Kan, J.A. |
title |
Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality |
title_short |
Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality |
title_full |
Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality |
title_fullStr |
Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality |
title_full_unstemmed |
Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality |
title_sort |
micromachining using a focused mev proton beam for the production of high precision 3d microstructures with vertical sidewalls of high orthogonality |
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2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/98796 |
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1781786950200459264 |