New developments in the applications of proton beam writing

New developments in the applications of proton beam writing

10.1016/j.nimb.2005.04.099

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Bibliographic Details
Main Authors: Mistry, P., Gomez-Morilla, I., Grime, G.W., Webb, R.P., Gwilliam, R., Cansell, A., Merchant, M., Kirkby, K.J., Teo, E.J., Breese, M.B.H., Bettiol, A.A., Blackwood, D.J., Watt, F.
Other Authors: MATERIALS SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electrochemical etching
GaAs
Proton beam writing
Silicon
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98807
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2005.04.099

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