New developments in the applications of proton beam writing

10.1016/j.nimb.2005.04.099

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Bibliographic Details
Main Authors:	Mistry, P., Gomez-Morilla, I., Grime, G.W., Webb, R.P., Gwilliam, R., Cansell, A., Merchant, M., Kirkby, K.J., Teo, E.J., Breese, M.B.H., Bettiol, A.A., Blackwood, D.J., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Electrochemical etching GaAs Proton beam writing Silicon
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98807
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98807
record_format	dspace
spelling	sg-nus-scholar.10635-988072024-11-14T18:39:04Z New developments in the applications of proton beam writing Mistry, P. Gomez-Morilla, I. Grime, G.W. Webb, R.P. Gwilliam, R. Cansell, A. Merchant, M. Kirkby, K.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A. Blackwood, D.J. Watt, F. PHYSICS MATERIALS SCIENCE Electrochemical etching GaAs Proton beam writing Silicon 10.1016/j.nimb.2005.04.099 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 237 1-2 188-192 NIMBE 2014-10-16T09:51:41Z 2014-10-16T09:51:41Z 2005-08 Conference Paper Mistry, P., Gomez-Morilla, I., Grime, G.W., Webb, R.P., Gwilliam, R., Cansell, A., Merchant, M., Kirkby, K.J., Teo, E.J., Breese, M.B.H., Bettiol, A.A., Blackwood, D.J., Watt, F. (2005-08). New developments in the applications of proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 237 (1-2) : 188-192. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.04.099 0168583X http://scholarbank.nus.edu.sg/handle/10635/98807 000231543000036 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electrochemical etching GaAs Proton beam writing Silicon
spellingShingle	Electrochemical etching GaAs Proton beam writing Silicon Mistry, P. Gomez-Morilla, I. Grime, G.W. Webb, R.P. Gwilliam, R. Cansell, A. Merchant, M. Kirkby, K.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A. Blackwood, D.J. Watt, F. New developments in the applications of proton beam writing
description	10.1016/j.nimb.2005.04.099
author2	PHYSICS
author_facet	PHYSICS Mistry, P. Gomez-Morilla, I. Grime, G.W. Webb, R.P. Gwilliam, R. Cansell, A. Merchant, M. Kirkby, K.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A. Blackwood, D.J. Watt, F.
format	Conference or Workshop Item
author	Mistry, P. Gomez-Morilla, I. Grime, G.W. Webb, R.P. Gwilliam, R. Cansell, A. Merchant, M. Kirkby, K.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A. Blackwood, D.J. Watt, F.
author_sort	Mistry, P.
title	New developments in the applications of proton beam writing
title_short	New developments in the applications of proton beam writing
title_full	New developments in the applications of proton beam writing
title_fullStr	New developments in the applications of proton beam writing
title_full_unstemmed	New developments in the applications of proton beam writing
title_sort	new developments in the applications of proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98807
_version_	1821204155667054592

New developments in the applications of proton beam writing

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