New developments in the applications of proton beam writing

• Main Authors: Mistry, P., Gomez-Morilla, I., Grime, G.W., Webb, R.P., Gwilliam, R., Cansell, A., Merchant, M., Kirkby, K.J., Teo, E.J., Breese, M.B.H., Bettiol, A.A., Blackwood, D.J., Watt, F.
• Other Authors: MATERIALS SCIENCE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Electrochemical etching; GaAs; Proton beam writing; Silicon
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98807
• Institution: National University of Singapore

10.1016/j.nimb.2005.04.099