Novel types of silicon waveguides fabricated using proton beam irradiation

Novel types of silicon waveguides fabricated using proton beam irradiation

10.1117/12.841536

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Bibliographic Details
Main Authors: Teo, E.J., Yang, P., Xiong, B.Q., Breese, M.B.H., Mashanovich, G.Z., Ow, Y.S., Reed, G.T., Bettiol, A.A.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electrochemical etching
Porous silicon
Silicon photonics
Silicon-on-insulator
Waveguides
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98818
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Institution: National University of Singapore
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Summary:10.1117/12.841536

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