Novel types of silicon waveguides fabricated using proton beam irradiation

• Main Authors: Teo, E.J., Yang, P., Xiong, B.Q., Breese, M.B.H., Mashanovich, G.Z., Ow, Y.S., Reed, G.T., Bettiol, A.A.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Electrochemical etching; Porous silicon; Silicon photonics; Silicon-on-insulator; Waveguides
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98818
• Institution: National University of Singapore

10.1117/12.841536