Novel types of silicon waveguides fabricated using proton beam irradiation

10.1117/12.841536

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Bibliographic Details
Main Authors:	Teo, E.J., Yang, P., Xiong, B.Q., Breese, M.B.H., Mashanovich, G.Z., Ow, Y.S., Reed, G.T., Bettiol, A.A.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Electrochemical etching Porous silicon Silicon photonics Silicon-on-insulator Waveguides
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98818
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98818
record_format	dspace
spelling	sg-nus-scholar.10635-988182023-10-29T23:15:03Z Novel types of silicon waveguides fabricated using proton beam irradiation Teo, E.J. Yang, P. Xiong, B.Q. Breese, M.B.H. Mashanovich, G.Z. Ow, Y.S. Reed, G.T. Bettiol, A.A. PHYSICS Electrochemical etching Porous silicon Silicon photonics Silicon-on-insulator Waveguides 10.1117/12.841536 Proceedings of SPIE - The International Society for Optical Engineering 7606 - PSISD 2014-10-16T09:51:48Z 2014-10-16T09:51:48Z 2010 Conference Paper Teo, E.J., Yang, P., Xiong, B.Q., Breese, M.B.H., Mashanovich, G.Z., Ow, Y.S., Reed, G.T., Bettiol, A.A. (2010). Novel types of silicon waveguides fabricated using proton beam irradiation. Proceedings of SPIE - The International Society for Optical Engineering 7606 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.841536 9780819480026 0277786X http://scholarbank.nus.edu.sg/handle/10635/98818 000285576100019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electrochemical etching Porous silicon Silicon photonics Silicon-on-insulator Waveguides
spellingShingle	Electrochemical etching Porous silicon Silicon photonics Silicon-on-insulator Waveguides Teo, E.J. Yang, P. Xiong, B.Q. Breese, M.B.H. Mashanovich, G.Z. Ow, Y.S. Reed, G.T. Bettiol, A.A. Novel types of silicon waveguides fabricated using proton beam irradiation
description	10.1117/12.841536
author2	PHYSICS
author_facet	PHYSICS Teo, E.J. Yang, P. Xiong, B.Q. Breese, M.B.H. Mashanovich, G.Z. Ow, Y.S. Reed, G.T. Bettiol, A.A.
format	Conference or Workshop Item
author	Teo, E.J. Yang, P. Xiong, B.Q. Breese, M.B.H. Mashanovich, G.Z. Ow, Y.S. Reed, G.T. Bettiol, A.A.
author_sort	Teo, E.J.
title	Novel types of silicon waveguides fabricated using proton beam irradiation
title_short	Novel types of silicon waveguides fabricated using proton beam irradiation
title_full	Novel types of silicon waveguides fabricated using proton beam irradiation
title_fullStr	Novel types of silicon waveguides fabricated using proton beam irradiation
title_full_unstemmed	Novel types of silicon waveguides fabricated using proton beam irradiation
title_sort	novel types of silicon waveguides fabricated using proton beam irradiation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98818
_version_	1781786953749889024

Novel types of silicon waveguides fabricated using proton beam irradiation

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