Optimization of particle fluence in micromachining of CR-39

10.1016/j.nimb.2005.01.087

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Bibliographic Details
Main Authors:	Rajta, I., Baradács, E., Bettiol, A.A., Csige, I., Tokési, K., Budai, L., Kiss, Á.Z.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	CR-39 Fluence sensitivity P-beam writing Polyallyl diglycol carbonate (PADC) Proton beam micromachining
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98834
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98834
record_format	dspace
spelling	sg-nus-scholar.10635-988342023-10-25T22:28:03Z Optimization of particle fluence in micromachining of CR-39 Rajta, I. Baradács, E. Bettiol, A.A. Csige, I. Tokési, K. Budai, L. Kiss, Á.Z. PHYSICS CR-39 Fluence sensitivity P-beam writing Polyallyl diglycol carbonate (PADC) Proton beam micromachining 10.1016/j.nimb.2005.01.087 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 384-388 NIMBE 2014-10-16T09:52:00Z 2014-10-16T09:52:00Z 2005-04 Conference Paper Rajta, I., Baradács, E., Bettiol, A.A., Csige, I., Tokési, K., Budai, L., Kiss, Á.Z. (2005-04). Optimization of particle fluence in micromachining of CR-39. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 384-388. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.087 0168583X http://scholarbank.nus.edu.sg/handle/10635/98834 000229752400064 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CR-39 Fluence sensitivity P-beam writing Polyallyl diglycol carbonate (PADC) Proton beam micromachining
spellingShingle	CR-39 Fluence sensitivity P-beam writing Polyallyl diglycol carbonate (PADC) Proton beam micromachining Rajta, I. Baradács, E. Bettiol, A.A. Csige, I. Tokési, K. Budai, L. Kiss, Á.Z. Optimization of particle fluence in micromachining of CR-39
description	10.1016/j.nimb.2005.01.087
author2	PHYSICS
author_facet	PHYSICS Rajta, I. Baradács, E. Bettiol, A.A. Csige, I. Tokési, K. Budai, L. Kiss, Á.Z.
format	Conference or Workshop Item
author	Rajta, I. Baradács, E. Bettiol, A.A. Csige, I. Tokési, K. Budai, L. Kiss, Á.Z.
author_sort	Rajta, I.
title	Optimization of particle fluence in micromachining of CR-39
title_short	Optimization of particle fluence in micromachining of CR-39
title_full	Optimization of particle fluence in micromachining of CR-39
title_fullStr	Optimization of particle fluence in micromachining of CR-39
title_full_unstemmed	Optimization of particle fluence in micromachining of CR-39
title_sort	optimization of particle fluence in micromachining of cr-39
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98834
_version_	1781786957426196480

Optimization of particle fluence in micromachining of CR-39

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