Optimization of particle fluence in micromachining of CR-39

• Main Authors: Rajta, I., Baradács, E., Bettiol, A.A., Csige, I., Tokési, K., Budai, L., Kiss, Á.Z.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: CR-39; Fluence sensitivity; P-beam writing; Polyallyl diglycol carbonate (PADC); Proton beam micromachining
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98834
• Institution: National University of Singapore

10.1016/j.nimb.2005.01.087