Optimization of particle fluence in micromachining of CR-39
10.1016/j.nimb.2005.01.087
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Main Authors: | Rajta, I., Baradács, E., Bettiol, A.A., Csige, I., Tokési, K., Budai, L., Kiss, Á.Z. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98834 |
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Institution: | National University of Singapore |
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