Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection
10.1016/S0168-583X(03)01023-1
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2014
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sg-nus-scholar.10635-988502023-10-25T23:06:20Z Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection Udalagama, C.N.B. Bettiol, A.A. Van Kan, J.A. Watt, F. PHYSICS Dose normalization Ionoluminescence Proton beam micromachining SU-8 10.1016/S0168-583X(03)01023-1 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 256-259 NIMBE 2014-10-16T09:52:12Z 2014-10-16T09:52:12Z 2003-09 Conference Paper Udalagama, C.N.B., Bettiol, A.A., Van Kan, J.A., Watt, F. (2003-09). Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 : 256-259. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01023-1 0168583X http://scholarbank.nus.edu.sg/handle/10635/98850 000185352300048 Scopus |
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National University of Singapore |
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Singapore Singapore |
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Dose normalization Ionoluminescence Proton beam micromachining SU-8 |
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Dose normalization Ionoluminescence Proton beam micromachining SU-8 Udalagama, C.N.B. Bettiol, A.A. Van Kan, J.A. Watt, F. Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection |
| description |
10.1016/S0168-583X(03)01023-1 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Udalagama, C.N.B. Bettiol, A.A. Van Kan, J.A. Watt, F. |
| format |
Conference or Workshop Item |
| author |
Udalagama, C.N.B. Bettiol, A.A. Van Kan, J.A. Watt, F. |
| author_sort |
Udalagama, C.N.B. |
| title |
Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection |
| title_short |
Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection |
| title_full |
Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection |
| title_fullStr |
Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection |
| title_full_unstemmed |
Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection |
| title_sort |
proton beam micromachining dose normalization for su-8 using ionoluminescence detection |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98850 |
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1781786960719773696 |