Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection

Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection

10.1016/S0168-583X(03)01023-1

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Bibliographic Details
Main Authors: Udalagama, C.N.B., Bettiol, A.A., Van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Dose normalization
Ionoluminescence
Proton beam micromachining
SU-8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98850
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/98850

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